Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defects

Rathsack, BenjaminBenjaminRathsackNafus, KathleenKathleenNafusHatakeyama, ShinichiShinichiHatakeyamaKuwahara, YuheiYuheiKuwaharaKitano, JunichiJunichiKitanoGronheid, RoelRoelGronheidVaglio Pret, AlessandroAlessandroVaglio Pret2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16099Resist fundamentals for resolution, LER and sensitivity (RLS) performance tradeoffs and their relation to micro-bridging defectsProceedings paper