Design and characterization of thin SiGe membranes for MEMS packaging at wafer level

Gonzalez, PilarPilarGonzalezClaes, GertGertClaesDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13785Design and characterization of thin SiGe membranes for MEMS packaging at wafer levelProceedings paper