Vermang, BartBartVermangRothschild, AudeAudeRothschildLoozen, XavierXavierLoozenBearda, TwanTwanBeardaCornagliotti, EmanueleEmanueleCornagliottiJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18285ALD Al2O3 for industrial Si solar cells: advanced cleaning and in-depth characterizationMeeting abstract