Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrode

Menou, NicolasNicolasMenouPopovici, Mihaela IoanaMihaela IoanaPopoviciOpsomer, KarlKarlOpsomerKaczer, BenBenKaczerPawlak, MalgorzataMalgorzataPawlakFranquet, AlexisAlexisFranquetDetavernier, ChristopheChristopheDetavernierVan Elshocht, SvenSvenVan ElshochtWouters, DirkDirkWoutersBiesemans, SergeSergeBiesemansKittl, JorgeJorgeKittl2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15851Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrodeProceedings paper