Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry

Kim, Tae-GonTae-GonKimVerdonck, PatrickPatrickVerdonckCiofi, IvanIvanCiofiBarbarin, YohanYohanBarbarinTokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22604Characterization of metal permeation in porous low-k films by spectroscopic ellipsometryMeeting abstract