A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies

Hsu, B.B.HsuSyshchyk, O.O.SyshchykVais, AbhitoshAbhitoshVaisYu, HaoHaoYuAlian, AliRezaAliRezaAlianMols, YvesYvesMolsVondkar Kodandarama, KomalKomalVondkar KodandaramaKunert, BernardetteBernardetteKunertWaldron, NiamhNiamhWaldronSimoen, EddyEddySimoenCollaert, NadineNadineCollaert2022-03-112022-03-1120211541-7026WOS:000672563100007https://imec-publications.be/handle/20.500.12860/39425A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologiesProceedings paper10.1109/IRPS46558.2021.9405095978-1-7281-6893-7WOS:000672563100007LEVEL TRANSIENT SPECTROSCOPYRECOMBINATIONTRAPS