Electrical and DLTS Characterization of AlN buffers for GaN on Si technology

Mare, JurajJurajMareMikolasek, MiroslavMiroslavMikolasekDrobny, JakubJakubDrobnyZhao, MingMingZhaoStoffels, SteveSteveStoffelsKosa, ArpadArpadKosaBenko, PeterPeterBenkoChvála, AlešAlešChválaBakeroot, BenoitBenoitBakerootDecoutere, StefaanStefaanDecoutereStuchlikova, LubicaLubicaStuchlikova2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33532Electrical and DLTS Characterization of AlN buffers for GaN on Si technologyMeeting abstract