A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

Travaly, YoussefYoussefTravalySchuhmacher, JorgJorgSchuhmacherBaklanov, MikhaïlMikhaïlBaklanovGiangrandi, SimoneSimoneGiangrandiRichard, OlivierOlivierRichardBrijs, BertBertBrijsVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaexAbell, ThomasThomasAbellSomers, K.R.FK.R.FSomersHendrickx, M.F.AM.F.AHendrickxVanquickenborne, L.G.L.G.VanquickenborneCeulemans, A.A.CeulemansJonas, A.MA.MJonas2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/11331A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substratesJournal article