Microtexture and electromigration-induced drift in electroplated damascene Cu

Proost, JorisJorisProostHirato, T.T.HiratoFuruhara, T.T.FuruharaMaex, KarenKarenMaexCelis, Jean-PierreJean-PierreCelis2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4679Microtexture and electromigration-induced drift in electroplated damascene CuJournal article