Efficient extraction of thin film thermal properties via parametric model order reduction and optimization

Bechtold, T.T.BechtoldHohlfeld, DennisDennisHohlfeldRudnyi, E.B.E.B.Rudnyi2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14959Efficient extraction of thin film thermal properties via parametric model order reduction and optimizationProceedings paper