A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics

Lanckmans, FilipFilipLanckmansGeenen, LucLucGeenenVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3607A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectricsOral presentation