Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomance

Kubicek, StefanStefanKubicekBiesemans, SergeSergeBiesemansDe Meyer, KristinKristinDe Meyer2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1973Investigation of the effect of the extension implant energy on deep submicron CMOS device perfomanceProceedings paper