The sapphire surface structure and its impact on MOCVD grown wafer-scale MoS2 uniformity and MOSFET variability

Shi, YuanyuanYuanyuanShiGroven, BenjaminBenjaminGrovenSerron, JillJillSerronHan, HanHanHanBanerjee, SreetamaSreetamaBanerjeeWu, XiangyuXiangyuWuLudwig, JonathanJonathanLudwigAsselberghs, IngeIngeAsselberghsLin, DennisDennisLinMorin, PierrePierreMorinCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33992The sapphire surface structure and its impact on MOCVD grown wafer-scale MoS2 uniformity and MOSFET variabilityOral presentation