Tsvetanova, DianaDianaTsvetanovaVos, RitaRitaVosPohland, MaximilianMaximilianPohlandVanstreels, KrisKrisVanstreelsFranquet, AlexisAlexisFranquetVereecke, GuyGuyVereeckeMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18107Solvent-based strip of high dose ion implanted photoresistMeeting abstract