Sub-micron technology in group-III nitrides: application to electronic devices

Palacios, T.T.PalaciosCalle, F.F.CalleMonroy, E.E.MonroyGrajal, J.J.GrajalEickhoff, M.M.EickhoffAmbacher, O.O.AmbacherOmnès, F.F.OmnèsBougrioua, F.F.BougriouaMoerman, IngridIngridMoermanMuñoz, E.E.Muñoz2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5558Sub-micron technology in group-III nitrides: application to electronic devicesMeeting abstract