Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology

Chang, Kao-ShuoKao-ShuoChangGreen, Martin L.Martin L.GreenHattrick-Simpers, Jason R.Jason R.Hattrick-SimpersTakeuchi, IchiroIchiroTakeuchiSuehle, John S.John S.SuehleCelik, OzgurOzgurCelikDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008-100018-9383https://imec-publications.be/handle/20.500.12860/13497Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodologyJournal article