An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures

Jones, S. K.S. K.JonesPoncet, A.A.PoncetDe Wolf, IngridIngridDe WolfAhmed, M.M.AhmedRothwell, W. J.W. J.Rothwell2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/211An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation StructuresProceedings paper