Khan, ZohebZohebKhanNuytten, ThomasThomasNuyttenFavia, PaolaPaolaFaviaFleischmann, ClaudiaClaudiaFleischmannDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorst2022-11-302022-08-052022-11-3020220021-8979WOS:000829242700002https://imec-publications.be/handle/20.500.12860/40213Off-axis Raman spectroscopy for nanoscale stress metrologyJournal article10.1063/5.0100602WOS:000829242700002STRAINED SILICONSIGEGEENHANCEMENTDEVICESDIAMONDSTRIPESGAP