Investigation of the formation process of MCs+-molecular ions during sputtering

Vlekken, J.J.VlekkenD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, LucLucDe Schepper2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4925Investigation of the formation process of MCs+-molecular ions during sputteringJournal article