Optimization of Ru based hybrid floating gate for planar NAND flash

Breuil, LaurentLaurentBreuilLisoni, JuditJuditLisoniBlomme, PieterPieterBlommeVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25019Optimization of Ru based hybrid floating gate for planar NAND flashProceedings paper