Maex, KarenKarenMaexBrongersma, SywertSywertBrongersmaIacopi, FrancescaFrancescaIacopiTravaly, YoussefYoussefTravalyTokei, ZsoltZsoltTokeiBruynseraede, ChristopheChristopheBruynseraedeBeyer, GeraldGeraldBeyer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9252Characterization and optimization of Cu-low k for 45nm and beyondProceedings paper