IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced Metrology

Mehendale, M.M.MehendaleAntonelli, A.A.AntonelliMair, R.R.MairMukundhan, P.P.MukundhanBogdanowicz, JanuszJanuszBogdanowiczCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayYasin, FarrukhFarrukhYasinCrotti, DavideDavideCrotti2022-03-162022-03-1620211078-8743WOS:000680838600001https://imec-publications.be/handle/20.500.12860/39449IMAGING OF OVERLAY AND ALIGNMENT MARKERS UNDER OPAQUE LAYERS USING PICOSECOND LASER ACOUSTIC MEASUREMENTS AM: Advanced MetrologyProceedings paper10.1109/ASMC51741.2021.9435649978-1-7281-8645-0WOS:000680838600001