Rosenbusch, A.A.RosenbuschHourd, A.A.HourdJuffermans, CasperCasperJuffermansKirsch, H.H.KirschLalanne, F.F.LalanneMaurer, W.W.MaurerRomeo, C.C.RomeoRonse, KurtKurtRonseSchiavone, P.P.SchiavoneSimecek, M.M.SimecekToublan, O.O.ToublanVermeulen, TomTomVermeulenWatson, J.J.WatsonZiegler, W.W.ZieglerZimmerman, R.R.Zimmerman2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3781Application of a new approach to optical proximity correctionProceedings paper