Impact of the gate material on the deep levels in a-Si:H/c-SI metal-insulator-semiconductor capacitors

Simoen, EddyEddySimoenFerro, ValentinaValentinaFerroO'Sullivan, BarryBarryO'Sullivan2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27317Impact of the gate material on the deep levels in a-Si:H/c-SI metal-insulator-semiconductor capacitorsProceedings paperhttp://www.scientific.net/SSP.242.61