Demuynck, StevenStevenDemuynckMao, MingMingMaoKunnen, EddyEddyKunnenVersluijs, JankoJankoVersluijsCroes, KristofKristofCroesWu, ChenChenWuSchaekers, MarcMarcSchaekersPeter, AntonyAntonyPeterKauerauf, ThomasThomasKaueraufTeugels, LieveLieveTeugelsBoemmels, JuergenJuergenBoemmels2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23747Contact module at dense gate pitch technology challengesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6831894