Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnections

Jourdan, NicolasNicolasJourdanVarela Pedreira, OlallaOlallaVarela Pedreiravan der Veen, MarleenMarleenvan der VeenAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtTokei, ZsoltZsoltTokei2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30982Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnectionsProceedings paperhttp://www.ssdm.jp/SSDM2018_TechnicalProgram-All_Sep11-13.pdf?d=20180824