Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometer

Wen, LianggongLianggongWenHaspeslagh, LucLucHaspeslaghDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwPuers, BobBobPuers2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18345Design and characterisation of a CMOS compatible poly-SiGe low-g capacitive accelerometerProceedings paper