ESD Robustness of Germanium Photodetectors in Advanced Silicon Photonics Technology

Chen, Shih-HungShih-HungChenFu, Po-YuanPo-YuanFuTsiara, ArtemisiaArtemisiaTsiaraVan De Peer, MyriamMyriamVan De PeerSimicic, MarkoMarkoSimicicMusibau, SolomonSolomonMusibauBan, YoojinYoojinBanKao, K. H.K. H.KaoChen, Wen-ChiehWen-ChiehChenSerbulova, KaterynaKaterynaSerbulovaVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsilCroes, KristofKristofCroes2025-06-252024-12-012025-06-252024979-8-3503-6546-70739-5159WOS:001337944800002https://imec-publications.be/handle/20.500.12860/44885ESD Robustness of Germanium Photodetectors in Advanced Silicon Photonics TechnologyProceedings paper10.23919/EOS/ESD61719.2024.10702103978-1-58537-353-6WOS:001337944800002