Sah, KaushikKaushikSahChen, ZhijinZhijinChenZhang, YaoYaoZhangZhang, LimingLimingZhangZhang, CaoCaoZhangHiggins, CraigCraigHigginsBurov, AnatolyAnatolyBurovParsey, GuyGuyParseyVukkadala, PradeepPradeepVukkadalaGronheid, RoelRoelGronheidJain, ArpitArpitJainRamini, RamakanthRamakanthRaminiAgrawal, AnkurAnkurAgrawalSharma, GarimaGarimaSharmaCross, AndrewAndrewCrossRoy, SyamashreeSyamashreeRoyBlanco, VictorVictorBlanco2024-08-292024-06-152024-08-292024978-1-5106-7216-10277-786XWOS:001224296200100https://imec-publications.be/handle/20.500.12860/44054Hotspot discovery and variability analysis for advanced EUV processesProceedings paper10.1117/12.3011178978-1-5106-7217-8WOS:001224296200100