The effects of surface topography of nanopatterned substrates on the Directed Self Assembly of block copolymers

Garner, GrantGrantGarnerGronheid, RoelRoelGronheidNealey, PaulPaulNealeyde Pablo, JuanJuande Pablo2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25287The effects of surface topography of nanopatterned substrates on the Directed Self Assembly of block copolymersProceedings paper