Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry

Jayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieBillen, ArneArneBillenDekkers, HaroldHaroldDekkersDouhard, BastienBastienDouhardConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-222021-10-2220150169-4332https://imec-publications.be/handle/20.500.12860/25427Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistryJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433214023265