Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrode

Qaid, MohammadMohammadQaidRadu, IulianaIulianaRaduCott, DaireDaireCottAL-SALHI, MohamadMohamadAL-SALHIVereecken, PhilippePhilippeVereecken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21355Electrical characterization of 3D capacitor with carbon nanowalls as bottom electrodeMeeting abstract