Fabrication of Pseudomorphic AlGaAs/InGaAs HEMTs Using CH4/H2 RIE for Gate Recessing

Pereira, RicardoRicardoPereiraVan Hove, MarleenMarleenVan HoveVan Rossum, MarcMarcVan Rossum2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/819Fabrication of Pseudomorphic AlGaAs/InGaAs HEMTs Using CH4/H2 RIE for Gate RecessingOral presentation