Establishing the relationship between low-k dielectric properties and intrinsic conduction and degradation mechanisms

Wu, ChenChenWuLi, YunlongYunlongLiCroes, KristofKristofCroes2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29949Establishing the relationship between low-k dielectric properties and intrinsic conduction and degradation mechanismsMeeting abstracthttps://mrsspring.zerista.com/event/member/365550?embedded=1