High-speed growth of pentacene thin films by in-line organic vapor phase deposition

Rolin, CedricCedricRolinVasseur, KarolienKarolienVasseurSteudel, SoerenSoerenSteudelVicca, PeterPeterViccaGenoe, JanJanGenoeHeremans, PaulPaulHeremans2021-10-182021-10-182009-08https://imec-publications.be/handle/20.500.12860/16131High-speed growth of pentacene thin films by in-line organic vapor phase depositionProceedings paper