Standard cell architectures for N2 node: transition from FinFET to nanosheet and to forkheet device

Chehab, BilalBilalChehabWeckx, PieterPieterWeckxRyckaert, JulienJulienRyckaertSpessot, AlessioAlessioSpessotVerkest, DiederikDiederikVerkest2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34883Standard cell architectures for N2 node: transition from FinFET to nanosheet and to forkheet deviceProceedings paperhttps://doi.org/10.1117/12.2548573