Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures

Sioncke, SonjaSonjaSionckeBrunco, DavidDavidBruncoMeuris, MarcMarcMeurisUwamahoro, OlivierOlivierUwamahoroVan Steenbergen, JanJanVan SteenbergenVrancken, EviEviVranckenHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14486Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixturesProceedings paper