Electron microscopic studies of Co- and Ti-germanosilicide films formed on SiGe layers

Jin, S.S.JinDonaton, R. A.R. A.DonatonBender, HugoHugoBenderMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2656Electron microscopic studies of Co- and Ti-germanosilicide films formed on SiGe layersProceedings paper