Reliability of high mobility (si)Ge channel pMOSFETs for future CMOS applications: toward reliable ultra-thin EOT nanoscale transistors

Franco, JacopoJacopoFranco2021-10-212021-10-212013-01https://imec-publications.be/handle/20.500.12860/22357Reliability of high mobility (si)Ge channel pMOSFETs for future CMOS applications: toward reliable ultra-thin EOT nanoscale transistorsPHD thesis