Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL

Collaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersDilliway, GabrielaGabrielaDilliwayIyengar, VikramVikramIyengarAugendre, EmmanuelEmmanuelAugendreLeys, FrederikFrederikLeysCayrefourcq, I.I.CayrefourcqGhyselen, B.B.GhyselenLoo, RogerRogerLooJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11896Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESLProceedings paper