Advanced USJ for high-k / metal gate CMOS devices

Absil, PhilippePhilippeAbsilOrtolland, ClaudeClaudeOrtollandAoulaiche, MarcMarcAoulaicheRosseel, ErikErikRosseelVerheyen, PeterPeterVerheyenVrancken, ChristaChristaVranckenHoriguchi, NaotoNaotoHoriguchiNoda, TajiiTajiiNodaFelch, SusanSusanFelchSchreutelkamp, RobRobSchreutelkampHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13279Advanced USJ for high-k / metal gate CMOS devicesMeeting abstract