Lima, Lucas Petersen BarbosaLucas Petersen BarbosaLimaDekkers, HaroldHaroldDekkersLisoni, JuditJuditLisoniDiniz, JoseJoseDinizVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220140021-8979https://imec-publications.be/handle/20.500.12860/24143Metal gate work function tuning by Al incorporation in TiNJournal articlehttps://doi.org/10.1063/1.4866323