Gonzalez, PilarPilarGonzalezLenci, SilviaSilviaLenciHaspeslagh, LucLucHaspeslaghDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15371Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applicationsProceedings paper