Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low temperature

Groven, BenjaminBenjaminGrovenClaes, DieterDieterClaesNalin Mehta, AnkitAnkitNalin MehtaBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsCaymax, MattyMattyCaymaxRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabie2021-10-272021-10-2720190021-9606https://imec-publications.be/handle/20.500.12860/33063Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low temperatureJournal articlehttps://aip.scitation.org/doi/full/10.1063/1.5048346