On the capacitance and conductance calculations of integrated- circuit interconnects with thick conductors

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5857On the capacitance and conductance calculations of integrated- circuit interconnects with thick conductorsJournal article