Accurate prediction of device performance : Reconstructing 2D-active dopant profiles from 2D-carrier profiles in the presence of extensive mobile carrier diffusion

Nazir, AftabAftabNazirEyben, PierrePierreEybenClarysse, TrudoTrudoClarysseSpessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24312Accurate prediction of device performance : Reconstructing 2D-active dopant profiles from 2D-carrier profiles in the presence of extensive mobile carrier diffusionMeeting abstract