Development and optimization of FIB-based sample preparation for SSRM

Eyben, PierrePierreEybenMody, JayJayModyNazir, AftabAftabNazirSchulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17092Development and optimization of FIB-based sample preparation for SSRMOral presentation