Assessment of Ge1-xSnx alloys for strained Ge CMOS devices

Takeuchi, ShotaroShotaroTakeuchiShimura, YosukeYosukeShimuraNishimura, TsuyoshiTsuyoshiNishimuraVincent, BenjaminBenjaminVincentEneman, GeertGeertEnemanClarysse, TrudoTrudoClarysseDemeulemeester, JelleJelleDemeulemeesterTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantommeDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxLoo, RogerRogerLooNakatsuka, OsamuOsamuNakatsukaSakai, A.A.SakaiZaima, ShigeakiShigeakiZaima2021-10-182021-10-182010-10https://imec-publications.be/handle/20.500.12860/18065Assessment of Ge1-xSnx alloys for strained Ge CMOS devicesProceedings paper