Impact of recessed S/D SiGe integration parameters on device performance

Washington, LoriLoriWashingtonNouri, FaranFaranNouriVerheyen, PeterPeterVerheyenMoroz, VictorVictorMorozKawaguchi, MarcMarcKawaguchiYihwan, KimKimYihwanSamoilov, ArkadiiiArkadiiiSamoilovJurczak, GosiaGosiaJurczak2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11545Impact of recessed S/D SiGe integration parameters on device performanceProceedings paper