InGaAs tunnel FET with sub-nanometer EOT and sub-60 mV/dec sub-threshold swing at room temperature

Alian, AliRezaAliRezaAlianMols, YvesYvesMolsBordallo, Caio C. M.Caio C. M.BordalloVerreck, DevinDevinVerreckVerhulst, AnneAnneVerhulstVandooren, AnneAnneVandoorenRooyackers, RitaRitaRooyackersAgopian, P.G.DP.G.DAgopianMartino, J.A.J.A.MartinoThean, AaronAaronTheanLin, DennisDennisLinMocuta, DanDanMocutaCollaert, NadineNadineCollaert2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/26282InGaAs tunnel FET with sub-nanometer EOT and sub-60 mV/dec sub-threshold swing at room temperatureJournal articlehttp://aip.scitation.org/doi/pdf/10.1063/1.4971830